Use Cases

Voids in Bonded Substrates

Wafer bonding is a critical process step in advanced semiconductor manufacturing. It is used to join two wafers face-to-face to create stacked structures for 3D integration, MEMS packaging, power devices, …

Full Wafer Thin Film Measurements

Thin film layers are the foundation of every modern semiconductor device. Controlling the thickness and uniformity of these films across the entire wafer is critical because even nanometre-scale variations translate …

Profile of GaN Die Edge

11:22 AM Wafer dicing is the process of separating a finished semiconductor wafer into individual dies. While it appears straightforward compared to the complexity of front-end fabrication, it is a …

Profile measurements of dry etched structures

Dry etching is one of the most critical process steps in semiconductor fabrication, used to transfer circuit patterns from photoresist into the underlying material layers such as silicon dioxide, silicon …

lineWLI as Roughness Sensor for Wafers

Backgrinding reduces silicon wafers to the thickness required for advanced packaging. However, the grinding process leaves a damaged surface layer whose roughness directly determines die strength, downstream bonding yield, and …

Polka Dot Beam Splitter

Sample: A polka dot beam splitter (Thorlabs’ BPD254-FS) consists of 100 µm large metallic squares on top of a glass substrate. lineWLI technology measures the profile of one line in …