WLI sensor

Use Cases

Surface of Glass Substrates

Glass substrates are emerging as an important platform for advanced packaging and redistribution layers, driven by their combination of low coefficient of thermal expansion, excellent surface flatness, and low dielectric …

Surface Profiles of IC Packages

Wafer level packaging (WLP) pushes interconnect density and form factor to their limits, but it also pushes metrology to its limits. Inspection of bump height, redistribution layer (RDL) step heights, …

Voids in Bonded Substrates

Wafer bonding is a critical process step in advanced semiconductor manufacturing. It is used to join two wafers face-to-face to create stacked structures for 3D integration, MEMS packaging, power devices, …