Scanning white-light interferometry (sWLI) and phase-shifting WLI (pWLI) reconstruct surface topography from the coherence envelope or phase of a broadband interference signal acquired point-by-point or frame-by-frame as the reference arm …

An anomaly in a thin film will disturb the phase of a light wave passing through it. Normal cameras only register the amplitude of the reflected light but are insensitive …

Glass substrates are emerging as an important platform for advanced packaging and redistribution layers, driven by their combination of low coefficient of thermal expansion, excellent surface flatness, and low dielectric …